CUED Publications database

A high-resolution resonant MEMS accelerometer

Zou, X and Seshia, AA (2015) A high-resolution resonant MEMS accelerometer. In: UNSPECIFIED pp. 1247-1250..

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© 2015 IEEE. This paper reports on a vacuum packaged resonant MEMS accelerometer that demonstrates some of the highest sensitivities reported to-date and a ∼7x scale factor enhancement relative to a recently reported prototype, benefiting from a larger proof mass and improved leverage amplification factor. The device describes a scale factor of 960 Hz/m/s 2 over a dynamic range of approximately +/- 0.5 m/s 2 . The experimentally measured intrinsic noise limited resolution of the accelerometer is less than 150 ng/√Hz in the frequency range from < 1 Hz up to 50 Hz.

Item Type: Conference or Workshop Item (UNSPECIFIED)
Divisions: Div C > Applied Mechanics
Depositing User: Cron Job
Date Deposited: 17 Jul 2017 18:57
Last Modified: 17 May 2018 07:41