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A PATTERN-RECOGNITION TECHNIQUE USING SEQUENCES OF MARKS FOR REGISTRATION IN ELECTRON-BEAM LITHOGRAPHY

HOLBURN, DM and JONES, GAC and AHMED, H (1981) A PATTERN-RECOGNITION TECHNIQUE USING SEQUENCES OF MARKS FOR REGISTRATION IN ELECTRON-BEAM LITHOGRAPHY. J VAC SCI TECHNOL, 19. pp. 1229-1233. ISSN 0022-5355

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Item Type: Article
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Depositing User: Cron job
Date Deposited: 04 Feb 2015 22:30
Last Modified: 12 Feb 2015 01:19
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