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A PATTERN-RECOGNITION TECHNIQUE USING SEQUENCES OF MARKS FOR REGISTRATION IN ELECTRON-BEAM LITHOGRAPHY

HOLBURN, DM and JONES, GAC and AHMED, H (1981) A PATTERN-RECOGNITION TECHNIQUE USING SEQUENCES OF MARKS FOR REGISTRATION IN ELECTRON-BEAM LITHOGRAPHY. J VAC SCI TECHNOL, 19. pp. 1229-1233. ISSN 0022-5355

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Item Type: Article
Subjects: UNSPECIFIED
Divisions: Div B > Solid State Electronics and Nanoscale Science
Depositing User: Unnamed user with email sms67@cam.ac.uk
Date Deposited: 18 May 2016 18:14
Last Modified: 29 Aug 2016 02:29
DOI: