CUED Publications database

A PATTERN-RECOGNITION TECHNIQUE USING SEQUENCES OF MARKS FOR REGISTRATION IN ELECTRON-BEAM LITHOGRAPHY

HOLBURN, DM and JONES, GAC and AHMED, H (1981) A PATTERN-RECOGNITION TECHNIQUE USING SEQUENCES OF MARKS FOR REGISTRATION IN ELECTRON-BEAM LITHOGRAPHY. J VAC SCI TECHNOL, 19. pp. 1229-1233. ISSN 0022-5355

Full text not available from this repository.
Item Type: Article
Subjects: UNSPECIFIED
Divisions: Div B > Solid State Electronics and Nanoscale Science
Depositing User: Cron Job
Date Deposited: 07 Mar 2014 11:43
Last Modified: 08 Dec 2014 16:45
DOI: