HOLBURN, DM and JONES, GAC and AHMED, H (1981) A PATTERN-RECOGNITION TECHNIQUE USING SEQUENCES OF MARKS FOR REGISTRATION IN ELECTRON-BEAM LITHOGRAPHY. J VAC SCI TECHNOL, 19. pp. 1229-1233. ISSN 0022-5355
Full text not available from this repository.| Item Type: | Article |
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| Subjects: | UNSPECIFIED |
| Divisions: | UNSPECIFIED |
| Depositing User: | Cron Job |
| Date Deposited: | 28 Oct 2011 16:37 |
| Last Modified: | 20 May 2013 01:33 |
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