CUED Publications database

SOI CMOS humidity sensor based on MWCNTs/MMA composite films. on the necessary verification of fabrication stages

Paun, MA and Falco, C and Udrea, F (2015) SOI CMOS humidity sensor based on MWCNTs/MMA composite films. on the necessary verification of fabrication stages. In: UNSPECIFIED pp. 103-106..

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Abstract

© 2015 IEEE. A humidity sensor, which is part of an air quality sensor system, based on MWCNTs/MMA composite doped with KOH has been studied. A standard SOI CMOS process, with only one post-processing step for the membrane etching, was used to fabricate the sensor presented. In order to have a homogeneous distribution of the CNTs in the solution, the tip sonication method was employed. The current voltage and resistance voltage characteristics have been investigated.

Item Type: Conference or Workshop Item (UNSPECIFIED)
Subjects: UNSPECIFIED
Divisions: Div B > Electronics, Power & Energy Conversion
Depositing User: Cron Job
Date Deposited: 17 Jul 2017 19:41
Last Modified: 03 Aug 2017 03:12
DOI: