CUED Publications database

Silicon-on-insulator photodiode on micro-hotplate platform with improved responsivity and high-temperature application

Li, G and Andre, N and Poncelet, O and Gerard, P and Ali, SZ and Udrea, F and Francis, LA and Zeng, Y and Flandre, D (2016) Silicon-on-insulator photodiode on micro-hotplate platform with improved responsivity and high-temperature application. IEEE Sensors Journal, 16. pp. 3017-3024. ISSN 1530-437X

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Abstract

© 2016 IEEE. This paper reports on the performance of a silicon-on-insulator photodiode suspended on a dielectric membrane. The micro-hotplate platform consists of a micro-heater and a thin-film lateral P + /P - /N + (PIN) photodiode. Without optimizing the multilayer stack on top of the PIN diode, experimental responsivities of the suspended photodiodes at room temperature (RT) are 0.02-0.06/W within the visible and near the IR light range, under a reverse bias of-2 V. Up to 2.5 ×, responsivity improvement has been achieved with regard to the diodes on the substrate thanks to reflection from the gold finish layer of the device package acting as a bottom mirror. Optimizing the layer stack above the diode, the responsivity of the on-membrane device can be theoretically improved up to 0.09-0.11 A/W within 450-520-nm wavelength range. Measured from RT up to 200 °C, the photodiodes on membrane continuously show an improved optical response under high-power LED illumination. Assisted by the micro-heater as heat source, the suspended photodiode can work stably up to 200 °C with in situ temperature sensing and control, which makes it highly suitable and attractive for higherature application. Full 2-D ATLAS device simulations have been comprehensively performed to investigate the optical and electrical characteristics. Very good agreement has been achieved between the numerical simulations and the experimental data.

Item Type: Article
Subjects: UNSPECIFIED
Divisions: Div B > Electronics, Power & Energy Conversion
Depositing User: Cron Job
Date Deposited: 17 Jul 2017 18:58
Last Modified: 07 Sep 2017 01:43
DOI: