CUED Publications database

Smart digital micro-capacitor based on doped nanocrystalline silicon with HFO2 high K insulator

Fu, YQ and Luo, JK and Milne, S and Flewitt, AJ and Milne, WI (2016) Smart digital micro-capacitor based on doped nanocrystalline silicon with HFO2 high K insulator. In: UNSPECIFIED pp. 1046-1049..

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Abstract

© 2016 IEEE. A digital variable capacitor has been designed and fabricated based on multi-cantilevers of doped nanocrystalline silicon with variable lengths, suspended over a bottom electrode on top of a high-k material, HfO2, to increase the tuning range of the capacitance. By applying a voltage between the electrodes, the electrostatic force pulls the beams in one-by-one, realizing a digital increase in capacitance. These devices were fabricated using a 4-mask process, and electrical tests confirmed the stepwise increase of the capacitance with voltage from the multi-cantilever digital capacitors.

Item Type: Conference or Workshop Item (UNSPECIFIED)
Subjects: UNSPECIFIED
Divisions: Div B > Solid State Electronics and Nanoscale Science
Depositing User: Cron Job
Date Deposited: 17 Jul 2017 19:32
Last Modified: 17 Aug 2017 01:25
DOI: