CUED Publications database

Low power MEMS oscillators for sensor applications

Do, C and Erbes, A and Yan, J and Seshia, AA (2015) Low power MEMS oscillators for sensor applications. In: UNSPECIFIED pp. 427-430..

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© 2014 IEEE. In this paper, we report on the design of a low power CMOS oscillator front-end interface circuit for micromachined resonant sensors. The circuits are fabricated in a standard 0.35 μm process while the MEMS resonators are fabricated in a SOI-MEMS foundry process with the two die electrically integrated through wirebonding in a ceramic package. The oscillator core draws less than 1μA at 1.2V supply while demonstrating a short-term frequency stability of less than 0.5 ppm.

Item Type: Conference or Workshop Item (UNSPECIFIED)
Divisions: Div C > Applied Mechanics
Depositing User: Cron Job
Date Deposited: 17 Jul 2017 19:34
Last Modified: 22 May 2018 08:02