CUED Publications database

Transparent thin film bulk acoustic wave resonators

De Miguel-Ramos, M and Rughoobur, G and Flewitt, A and Mirea, T and Díaz-Durán, B and Olivares, J and Clement, M and Iborra, E (2016) Transparent thin film bulk acoustic wave resonators. In: UNSPECIFIED.

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© 2016 IEEE. Transparent electronic devices have interesting applications in a wide range of fields, such as wearables, intelligent windows, new concepts of smartphones and sensors. In this work we present fully transparent AlN-based thin film bulk acoustic wave solidly mounted resonators. We have used indiumtin oxide as the transparent material for the electrodes and a transparent acoustic reflector consisting of alternating layers of SiO2 and Ta2O5 or WO3, to ensure an adequate acoustic confinement while keeping a high transparency. The fabricated devices display an electromechanical coupling coefficient up to 4% and a quality factor Q of 100. The measured transmittance in the visible spectrum (450 - 750 nm) is 75%.

Item Type: Conference or Workshop Item (UNSPECIFIED)
Divisions: Div B > Electronics, Power & Energy Conversion
Div B > Solid State Electronics and Nanoscale Science
Depositing User: Cron Job
Date Deposited: 17 Jul 2017 19:30
Last Modified: 22 May 2018 07:59