CUED Publications database

SU8 etch mask for patterning PDMS and its application to flexible fluidic microactuators

Gorissen, B and Van Hoof, C and Reynaerts, D and De Volder, M (2016) SU8 etch mask for patterning PDMS and its application to flexible fluidic microactuators. Microsystems & Nanoengineering, 2. p. 16045.

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Item Type: Article
Subjects: UNSPECIFIED
Divisions: Div E > Production Processes
Depositing User: Cron Job
Date Deposited: 17 Jul 2017 19:55
Last Modified: 24 Aug 2017 01:28
DOI: