CUED Publications database

SU8 etch mask for patterning PDMS and its application to flexible fluidic microactuators

Gorissen, B and Van Hoof, C and Reynaerts, D and De Volder, M (2016) SU8 etch mask for patterning PDMS and its application to flexible fluidic microactuators. MICROSYSTEMS & NANOENGINEERING, 2. p. 16045. ISSN 2055-7434

Full text not available from this repository.
Item Type: Article
Uncontrolled Keywords: PDMS lithography SU8 etch mask microactuator bending actuator fluidic actuator
Subjects: UNSPECIFIED
Divisions: Div E > Production Processes
Depositing User: Cron Job
Date Deposited: 17 Jul 2017 19:55
Last Modified: 22 May 2018 06:06
DOI: