CUED Publications database

CMOS-compatible SOI micro-hotplate-based oxygen sensor

Avramescu, V and De Luca, A and Brezeanu, M and Ali, SZ and Udrea, F and Buiu, O and Cobianu, C and Serban, B and Gardner, J and Dumitru, V and Stratulat, A (2016) CMOS-compatible SOI micro-hotplate-based oxygen sensor. In: UNSPECIFIED pp. 280-283..

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Abstract

© 2016 IEEE. The paper reports upon the design and characterization of a resistive O 2 sensor, which is fully CMOS-compatible and is based on an ultra-low-power Silicon on Insulator (SOI) micro-hotplate membrane. The microsensor employs SrTi 0.4 Fe 0.6 O 2.8 (STFO60) as sensing layer. Thermo-Gravimetric Analysis (TGA) Energy-Dispersive X-ray Spectroscopy (EDX), X-ray Diffraction (XRD) and Scanning Electron Microscope (SEM) techniques have been used to assess the quality of both the sensing layer and STFO-SOI interface. At room temperature, the SOI sensor shows good sensitivity and fast response time (≤ 6 seconds) to O 2 concentration ranging from 0% to 20% in a nitrogen atmosphere. This is the first experimental result showing the potential of this structure as O 2 sensor.

Item Type: Conference or Workshop Item (UNSPECIFIED)
Subjects: UNSPECIFIED
Divisions: Div B > Electronics, Power & Energy Conversion
Depositing User: Cron Job
Date Deposited: 17 Jul 2017 19:34
Last Modified: 14 Sep 2017 01:26
DOI: