CUED Publications database

Mode-localized sensing in micro- and nano-mechanical resonator arrays

Seshia, AA (2017) Mode-localized sensing in micro- and nano-mechanical resonator arrays. In: UNSPECIFIED.

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© 2016 IEEE. Micromachined resonant sensors have been researched for several decades for a variety of applications with potential benefits in terms of improved sensitivity and scalability relative to other transduction principles. Conventional implementations usually involve detection elements monitoring resonant frequency and/or dissipation shift in a single degree-of-freedom or several independent degrees-of-freedom. This paper discusses a complementary approach to resonant sensing in which the eigenstates in coupled array structures can be employed as a read-out mechanism offering the potential for both increased sensitivity and excellent common mode rejection. The technique, dubbed 'mode-localized sensing', is based on the spatial localization of vibration in an array of nearly identical weakly coupled resonators wherein the eigenstates are seen to be sensitive signatures of symmetry-breaking perturbations in structural parameters. The sensing methodology has been applied to a range of applications including gravimetric sensing, electrometry, inertial sensors and force sensors where in high accuracy approaches to physical transduction are often of interest. The paper concludes with a discussion of the current challenges in the field and an outlook on future developments.

Item Type: Conference or Workshop Item (UNSPECIFIED)
Divisions: Div C > Applied Mechanics
Depositing User: Cron Job
Date Deposited: 17 Jul 2017 19:13
Last Modified: 19 Jul 2018 07:35