CUED Publications database

Zinc tin oxide thin film transistors produced by a high rate reactive sputtering: Effect of tin composition and annealing temperatures

Niang, KM and Cho, J and Sadhanala, A and Milne, WI and Friend, RH and Flewitt, AJ (2017) Zinc tin oxide thin film transistors produced by a high rate reactive sputtering: Effect of tin composition and annealing temperatures. Physica Status Solidi (A) Applications and Materials Science, 214. ISSN 1862-6300

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Abstract

© 2017 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim Amorphous zinc tin oxides (a-ZTO), which are stoichiometrically close to the Zn 2 SnO 4 and ZnSnO 3 phases, have been deposited using remote-plasma reactive sputtering, and incorporated as the channel layers in thin film transistors (TFTs). The influence of tin composition and annealing temperatures on the structural and phase evolutions of the thin films, and the electrical performances of the TFTs are investigated. Zn 2 SnO 4 exhibited randomly oriented polycrystalline peaks at annealing temperatures ≥700 °C, while ZnSnO 3 decomposed into Zn 2 SnO 4 and SnO 2 at 950 °C. TFTs employing a Zn 2 SnO 4 channel, after a post-deposition annealing at 500 °C, exhibited a field effect mobility ∼14 cm 2 V −1 s −1 and a sub-threshold slope ∼0.6 V dec −1 . When the tin content was increased in the channel, as in ZnSnO 3 , TFTs exhibited an increase in field effect mobility ∼20 cm 2 V −1 s −1 , but with a slight deterioration of sub-threshold slope to ∼0.8 V dec −1 . When the post-deposition annealing temperature was reduced to 300 °C, a mobility as high as ∼10 cm 2 V −1 s −1 was still achieved, however, a significant shoulder in the I DS –V GS curve, together with a higher off-state current was observed. TFT characteristics are explained by the sub-bandgap defect states measured by photothermal deflection spectroscopy and the extracted Urbach energies.

Item Type: Article
Subjects: UNSPECIFIED
Divisions: Div B > Electronics, Power & Energy Conversion
Div B > Solid State Electronics and Nanoscale Science
Depositing User: Cron Job
Date Deposited: 17 Jul 2017 19:09
Last Modified: 07 Sep 2017 01:44
DOI: