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On the necessary verification of fabrication stages for SOI CMOS humidity sensors

Paun, MA and Falco, C and Udrea, F (2015) On the necessary verification of fabrication stages for SOI CMOS humidity sensors. Romanian Journal of Information Science and Technology, 18. pp. 376-387. ISSN 1453-8245

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Abstract

A humidity sensor, which is part of an air quality sensor sys-Tem, based on MWCNTs/MMA composite doped with KOH has been studied. A standard SOI CMOS process, with only one post-processing step for the mem- brane etching, was used to fabricate the sensor presented. In order to have a homogeneous distribution of the CNTs in the solution, the tip sonication method was employed. The current voltage and resistance voltage characteristics have been investigated, for different temperatures. Within the sensing layer of the proposed humidity sensor, the parabolic dependence of the resistance with the voltage applied has been proven for positive voltage values. The corresponding first and second order coeficients have been extracted.

Item Type: Article
Subjects: UNSPECIFIED
Divisions: Div B > Electronics, Power & Energy Conversion
Depositing User: Cron Job
Date Deposited: 17 Jul 2017 19:25
Last Modified: 08 Aug 2017 01:52
DOI: