CUED Publications database

Hydrogenated amorphous silicon thin-film transistors (a-Si: H TFTs)

Flewitt, AJ (2016) Hydrogenated amorphous silicon thin-film transistors (a-Si: H TFTs). In: Handbook of Visual Display Technology. UNSPECIFIED, pp. 887-909.

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Abstract

© Springer International Publishing Switzerland 2016. Hydrogenated amorphous silicon has enabled the active matrix liquid crystal display to dominate the flat panel display market and indeed has supplanted the cathode-ray tube as the leading display technology. This is the triumph of manufacturability over performance. Hydrogenated amorphous silicon thin-film transistors have several fundamental performance limitations which are directly linked to the physics of the amorphous material. However, the amorphous structure coupled with the use of plasma-enhanced chemical vapor deposition (PECVD) allows devices to be manufactured with exceptional reproducibility and uniformity over very large-area display backplanes. Consequently, the material limitations are tolerated and engineering solutions found to mitigate their effects.

Item Type: Book Section
Subjects: UNSPECIFIED
Divisions: Div B > Solid State Electronics and Nanoscale Science
Depositing User: Cron Job
Date Deposited: 17 Jul 2017 19:26
Last Modified: 08 Aug 2017 01:52
DOI: 10.1007/978-3-319-14346-0_47