CUED Publications database

Advances in piezoelectric thin films for acoustic biosensors, acoustofluidics and lab-on-chip applications

Fu, YQ and Luo, JK and Nguyen, NT and Walton, AJ and Flewitt, AJ and Zu, XT and Li, Y and McHale, G and Matthews, A and Iborra, E and Du, H and Milne, WI (2017) Advances in piezoelectric thin films for acoustic biosensors, acoustofluidics and lab-on-chip applications. Progress in Materials Science, 89. pp. 31-91.

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Abstract

Recently, piezoelectric thin films including zinc oxide (ZnO) and aluminium nitride (AlN) have found a broad range of lab-on-chip applications such as biosensing, particle/cell concentrating, sorting/patterning, pumping, mixing, nebulisation and jetting. Integrated acoustic wave sensing/microfluidic devices have been fabricated by depositing these piezoelectric films onto a number of substrates such as silicon, ceramics, diamond, quartz, glass, and more recently also polymer, metallic foils and bendable glass/silicon for making flexible devices. Such thin film acoustic wave devices have great potential for implementing integrated, disposable, or bendable/flexible lab-on-a-chip devices into various sensing and actuating applications. This paper discusses the recent development in engineering high performance piezoelectric thin films, and highlights the critical issues such as film deposition, MEMS processing techniques, control of deposition/processing parametres, film texture, doping, dispersion effects, film stress, multilayer design, electrode materials/ designs and substrate selections. Finally, advances in using thin film devices for lab-on-chip applications are summarised and future development trends are identified.

Item Type: Article
Uncontrolled Keywords: piezoelectric thin film acoustic wave biosensor microfluidics acoustofluidics lab-on-chip ZnO AlN
Subjects: UNSPECIFIED
Divisions: Div B > Solid State Electronics and Nanoscale Science
Depositing User: Cron Job
Date Deposited: 17 Jul 2017 19:26
Last Modified: 21 Sep 2017 01:38
DOI: