CUED Publications database

A Closed-Loop Readout Configuration for Mode-Localized Resonant MEMS Sensors

Zhao, C and Pandit, M and Sun, B and Sobreviela, G and Zou, X and Seshia, A (2017) A Closed-Loop Readout Configuration for Mode-Localized Resonant MEMS Sensors. Journal of Microelectromechanical Systems, 26. pp. 501-503.

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Abstract

This letter presents the first experimental results on the closed-loop characterization of a mode-localized microelectromechanical resonator system. Comparisons between the closed-loop oscillator approach and the open-loop frequency sweep approach show good agreement of output metrics including the amplitude ratios and mode frequencies. This new approach enables real-time measurements using emerging mode-localized resonant sensors and represents an important step toward realizing sensors based on this measurement principle.

Item Type: Article
Uncontrolled Keywords: mode localized resonant sensor self-sustained oscillator
Subjects: UNSPECIFIED
Divisions: Div C > Applied Mechanics
Depositing User: Cron Job
Date Deposited: 17 Jul 2017 19:11
Last Modified: 22 Apr 2021 06:55
DOI: 10.1109/JMEMS.2017.2690942