CUED Publications database

Experimental and theoretical study of a piezoelectric vibration energy harvester under high temperature

Arroyo, E and Jia, Y and Du, S and Chen, ST and Seshia, AA (2017) Experimental and theoretical study of a piezoelectric vibration energy harvester under high temperature. Journal of Microelectromechanical Systems, 26. pp. 1216-1225. ISSN 1057-7157

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Abstract

This paper focuses on studying the effect of increasing the ambient temperature up to 160 °C on the power harvested by an MEMS piezoelectric micro-cantilever manufactured using an aluminum nitride-on-silicon fabrication process. An experimental study shows that the peak output power decreases by 60% to 70% depending on the input acceleration. A theoretical study establishes the relationship of all important parameters with temperature and includes them into a temperature-dependent model. This model shows that around 50% of the power drop can be explained by a decreasing quality factor, and that thermal stresses account for around 30% of this decrease.

Item Type: Article
Subjects: UNSPECIFIED
Divisions: Div C > Applied Mechanics
Div B > Solid State Electronics and Nanoscale Science
Depositing User: Cron Job
Date Deposited: 15 Oct 2017 20:11
Last Modified: 15 Apr 2021 05:11
DOI: 10.1109/JMEMS.2017.2723626