CUED Publications database

Edge-anchored mode-matched micromachined gyroscopic disk resonator

Zou, X and Zhao, C and Seshia, AA (2017) Edge-anchored mode-matched micromachined gyroscopic disk resonator. In: 2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), 2017-6-18 to 2017-6-22, Kaohsiung, Taiwan pp. 2183-2186..

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© 2017 IEEE. This paper reports on a vacuum packaged circular disk gyroscopic resonator with T-shape anchors fabricated in a (100) single crystalline silicon substrate. This device topology simplifies the fabrication process as compared to previous approaches to realize center-anchored disk gyroscopes. Mode-matching of the trigonal modes of the disk is realized with open-loop characterization results demonstrating a Quality factor exceeding 1.5 million with an initial modal frequency split of 4.7 Hz and a natural frequency of approximately 0.976 MHz (4.81 ppm split). An approach to effective mode matching of such devices is described.

Item Type: Conference or Workshop Item (UNSPECIFIED)
Divisions: Div C > Applied Mechanics
Depositing User: Cron Job
Date Deposited: 16 Oct 2017 20:20
Last Modified: 13 Apr 2021 08:08
DOI: 10.1109/TRANSDUCERS.2017.7994509