CUED Publications database

Low power sub-milligram resonant MEMS load sensor

Do, C and Ganesan, A and Seshia, AA (2017) Low power sub-milligram resonant MEMS load sensor. In: UNSPECIFIED pp. 974-977..

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Abstract

A miniaturized resonant load sensor demonstrating sub-milligram sensitivity is presented. The sensor response is not limited by creep and hysteresis often observed in traditional load sensors. A prototype sensor demonstrates a resolution of 0.1 mg over a load range of 300 mg demonstrating excellent linearity over this range (R =0.9998). An energy efficient front-end CMOS readout circuit consumes only 5 μW from a 1.2 V supply. 2

Item Type: Conference or Workshop Item (UNSPECIFIED)
Subjects: UNSPECIFIED
Divisions: Div C > Applied Mechanics
Depositing User: Cron Job
Date Deposited: 16 Oct 2017 20:20
Last Modified: 01 Apr 2021 04:44
DOI: 10.1109/TRANSDUCERS.2017.7994213