CUED Publications database

Rapid thermal annealing of graphene-metal contact

Balci, O and Kocabas, C (2012) Rapid thermal annealing of graphene-metal contact. Applied Physics Letters, 101. ISSN 0003-6951

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Abstract

High quality graphene-metal contacts are desirable for high-performance graphene based electronics. Process related factors result large variation in the contact resistance. A post-processing method is needed to improve graphene-metal contacts. In this letter, we studied rapid thermal annealing (RTA) of graphene-metal contacts. We present results of a systematic investigation of device scaling before and after RTA for various metals. The results reveal that RTA provides a convenient technique to reduce contact resistance, thus to obtain reproducible device operation. © 2012 American Institute of Physics.

Item Type: Article
Subjects: UNSPECIFIED
Divisions: Div B > Solid State Electronics and Nanoscale Science
Depositing User: Cron Job
Date Deposited: 22 Mar 2018 01:27
Last Modified: 24 Nov 2020 08:37
DOI: 10.1063/1.4769817