CUED Publications database

Parametric noise reduction in a high-order nonlinear MEMS resonator utilizing its bifurcation points

Sobreviela, G and Zhao, C and Pandit, M and Do, C and Du, S and Zou, X and Seshia, A (2017) Parametric noise reduction in a high-order nonlinear MEMS resonator utilizing its bifurcation points. Journal of Microelectromechanical Systems, 26. pp. 1189-1195. ISSN 1057-7157

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Abstract

An electrostatically actuated non-linear microelectromechanical systems (MEMS) resonator can describe double hysteresis behavior in the measured frequency response due to the interplay between electrical and mechanical nonlinearities in the system. This paper provides the first experimental mapping of the stable and unstable branches of the frequency response of a MEMS resonator describing a double hysteretic frequency response using a closed-loop phase feedback oscillator. Furthermore, the frequency stability of the oscillator is compared for varying amplitude and phase feedback conditions, and it is experimentally demonstrated that parametric noise up-conversion can be suppressed in such a system by suitably biasing the resonator at one of the four bifurcation points in such a system. This result is qualitatively consistent with theoretical prediction and demonstrates that improved frequency stability in a non-linear MEMS oscillator is possible by suitably biasing the resonator using simultaneous amplitude and phase feedback.

Item Type: Article
Uncontrolled Keywords: Nonlinear MEMS resonator self-sustained oscillator oscillator frequency stability
Subjects: UNSPECIFIED
Divisions: Div C > Applied Mechanics
Depositing User: Cron Job
Date Deposited: 23 Jan 2018 01:42
Last Modified: 10 Apr 2021 00:44
DOI: 10.1109/JMEMS.2017.2736022