CUED Publications database

Closed-loop tracking of amplitude and frequency in a mode-localized resonant MEMS sensor

Pandit, M and Zhao, C and Sobreviela, G and Mustafazade, A and Seshia, AA (2017) Closed-loop tracking of amplitude and frequency in a mode-localized resonant MEMS sensor. In: 2017 Joint Conference of the European Frequency and Time Forum and IEEE International Frequency Control Symposium (EFTF/IFCS 2017), -- to --, Besancon, France pp. 510-513..

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Abstract

In this paper, the amplitude and frequency stability of a mode-localized sensor are characterized in a closed loop setup. The system describes an absolute amplitude ratio sensitivity of 5250 to stiffness perturbations in linear operation. A stability of 432ppm at 500s integration time is observed for amplitude ratio measurements. A resolution of 85ppb corresponding to normalised stiffness perturbations in amplitude ratio measurements is thus demonstrated at 500s integration time. Comparisons to frequency shift sensing within the same device shows that amplitude ratio sensing provides higher accuracies for long term measurements due to intrinsic common mode rejection properties in a mode-localized system.

Item Type: Conference or Workshop Item (UNSPECIFIED)
Subjects: UNSPECIFIED
Divisions: Div C > Applied Mechanics
Depositing User: Cron Job
Date Deposited: 23 Jan 2018 01:42
Last Modified: 15 Apr 2021 06:12
DOI: 10.1109/FCS.2017.8088944