CUED Publications database

CMOS technology platform for ubiquitous microsensors

Udrea, F and De Luca, A (2017) CMOS technology platform for ubiquitous microsensors. In: UNSPECIFIED pp. 43-52..

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In this paper we review a range of microsensors based on a common CMOS platform technology. The technology features a CMOS core which includes high temperature tungsten metallization and a post-CMOS deep reactive ion etching step of the substrate to release membranes, where the sensing elements are embedded. In one single process we were able to accommodate a variety of sensors such as gas, humidity, pressure, flow, temperature and infra-red detectors and emitters. The benefits of this platform are: (i) ultra-low power consumption, (ii) small form factor, (iii) high reliability and yield (iv) possibility of on-chip electronics and last but not least (v) low unit price.

Item Type: Conference or Workshop Item (UNSPECIFIED)
Divisions: Div B > Electronics, Power & Energy Conversion
Depositing User: Cron Job
Date Deposited: 27 Feb 2018 01:41
Last Modified: 10 Apr 2021 22:30
DOI: 10.1109/SMICND.2017.8101149