CUED Publications database

Constant temperature operation of a CMOS MEMS thermoelectronic multidirectional flow sensor

De Luca, A and Coull, JD and Udrea, F (2017) Constant temperature operation of a CMOS MEMS thermoelectronic multidirectional flow sensor. In: IEEE Sensors, 2017-10-29 to 2017-11-1 pp. 1-3..

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Abstract

© 2017 IEEE. In this paper we present the first CMOS MEMS thermoelectronic multidirectional flow sensor. We also introduce a Constant Temperature circuit based on diode thermal feedback and calibrate the sensor for 2D multidirectional wall shear stress measurements up to 2 Pa. The sensor electro-thermal transduction efficiency is 115 pW/°C. Average sensitivity is 250 mV/Pa at 225 °C operating temperature (Vd=0.55 V), and angular accuracy is below 5°.

Item Type: Conference or Workshop Item (UNSPECIFIED)
Subjects: UNSPECIFIED
Divisions: Div A > Turbomachinery
Depositing User: Cron Job
Date Deposited: 23 Oct 2018 01:26
Last Modified: 15 Apr 2021 05:49
DOI: 10.1109/ICSENS.2017.8233982